Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430688 | Two-stage pin lifter for de-chuck operations | Siyuan Tian | 2022-08-30 |
| 11384430 | Method for conditioning a ceramic coating | Hong Shih, Xiaomin Bin, Duane Outka, Gregory A. Pilgrim, Girish M. HUNDI +1 more | 2022-07-12 |