Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456158 | Ceramic structure for plasma processing apparatus and manufacturing method thereof | — | 2022-09-27 |
| 11355377 | Electrostatic chuck | Yun Ho Kim | 2022-06-07 |
| 11251061 | Electrostatic chuck and manufacturing method therefor | Yun Ho Kim, Ki Ryong Lee | 2022-02-15 |