Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11256167 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Hirofumi Kozakai | 2022-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11256167 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Hirofumi Kozakai | 2022-02-22 |