Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D965740 | Gas supply nozzle for substrate processing apparatus | Satoshi Fujii | 2022-10-04 |
| D944661 | Calibrator for wafer handling robots | Norihito Shitaka | 2022-03-01 |
| D940669 | Boat for substrate processing apparatus | Makoto Tsuri, Satoshi Fujii | 2022-01-11 |