Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538688 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2022-12-27 |
| 11424127 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Arito OGAWA | 2022-08-23 |