Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513085 | Measurement and control of wafer tilt for x-ray based metrology | Barry Blasenheim, Joseph A. Di Regolo, Yan Zhang, Huy D. Nguyen | 2022-11-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513085 | Measurement and control of wafer tilt for x-ray based metrology | Barry Blasenheim, Joseph A. Di Regolo, Yan Zhang, Huy D. Nguyen | 2022-11-29 |