Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221561 | System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control | Onur N. Demirer, Mark D. Smith | 2022-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221561 | System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control | Onur N. Demirer, Mark D. Smith | 2022-01-11 |