Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262591 | System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution | Ilya Bezel, Andrey Evgenievich Stepanov, Nikolay Sherbak | 2022-03-01 |
| 11262664 | System and method for protecting optics from vacuum ultraviolet light | John Savee, Evgeniia Butaeva, Serguei Likhanski, Gildardo Delgado | 2022-03-01 |