Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366307 | Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection | Hongxing Yuan, Tim Mahatdejkul | 2022-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366307 | Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection | Hongxing Yuan, Tim Mahatdejkul | 2022-06-21 |