Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11460765 | Exposure method, exposure apparatus, and semiconductor device manufacturing method | Manabu Takakuwa | 2022-10-04 |
| 11267237 | Substrate bonding apparatus | Manabu Takakuwa | 2022-03-08 |