Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11338448 | Substrate gripping hand and substrate transfer device including this substrate gripping hand | Takayuki Fukushima, Tetsuya Yoshida | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11338448 | Substrate gripping hand and substrate transfer device including this substrate gripping hand | Takayuki Fukushima, Tetsuya Yoshida | 2022-05-24 |