Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538658 | Theta stage mechanism and electron beam inspection apparatus | Takahiro Murata, Yoshihiro Izumi | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538658 | Theta stage mechanism and electron beam inspection apparatus | Takahiro Murata, Yoshihiro Izumi | 2022-12-27 |