Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333969 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Yamashita, Yutaka Watanabe, Takuya Kono, Masayuki Hatano | 2022-05-17 |
| 11282723 | Liquid delivery member, liquid delivery apparatus, and semiconductor device manufacturing method | Hironobu Tamura, Yoshiharu Ono | 2022-03-22 |