Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293097 | Apparatus for distributing gas and apparatus for processing substrate including the same | Suk-Chul Jung, Young Rok Kim | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293097 | Apparatus for distributing gas and apparatus for processing substrate including the same | Suk-Chul Jung, Young Rok Kim | 2022-04-05 |