Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11319388 | Radiation-sensitive resin composition, production method thereof, and resist pattern-forming method | Ken MARUYAMA, Yoshiki Nonoyama, Takuo Sone | 2022-05-03 |
| 11270883 | Pattern-forming method and composition | Hiroyuki Komatsu | 2022-03-08 |