Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11320735 | Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, carboxylic acid salt and carboxylic acid | Satoshi Okazaki | 2022-05-03 |
| 11281100 | Radiation-sensitive resin composition, onium salt compound and method for forming resist pattern | — | 2022-03-22 |