Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295953 | Method and apparatus for micromachining semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry | Hao Zhu, Zhi-Li Zhang, Shuaijie Zhu, Zhaoyang Zhang, Kun Xu +2 more | 2022-04-05 |