Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11286984 | Apparatus, system and method for an air bearing stage for component or devices | Jeroen Bosboom, Babak Naderi, Payman Rahimi, Michael McKenney, Kwok Yu +3 more | 2022-03-29 |