Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11252810 | Short-wavelength radiation source with multisectional collector module and method of collecting radiation | Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more | 2022-02-15 |