Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482404 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2022-10-25 |
| 11359274 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2022-06-14 |
| 11306391 | Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2022-04-19 |
| 11286555 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2022-03-29 |
| 11255012 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2022-02-22 |