Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441942 | Photoresist spectral sensitivity matching radiometer for trace/space width variation improvement | Matthew S. Lang, Kyle T. Tobias | 2022-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441942 | Photoresist spectral sensitivity matching radiometer for trace/space width variation improvement | Matthew S. Lang, Kyle T. Tobias | 2022-09-13 |