TO

Tetsuhiro Ohno

UL Ulvac: 2 patents #3 of 49Top 7%
Overall (2022): #104,995 of 548,613Top 20%
2
Patents 2022

Issued Patents 2022

Patent #TitleCo-InventorsDate
11505861 Substrate guide and carrier Toshinori Kaneko 2022-11-22
11473188 Sputtering apparatus Toshinori Kaneko 2022-10-18