Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11426775 | Cleaning method, method for producing silicon single crystal, and cleaning device | Koichi Maegawa, Satoru Hamakawa | 2022-08-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11426775 | Cleaning method, method for producing silicon single crystal, and cleaning device | Koichi Maegawa, Satoru Hamakawa | 2022-08-30 |