Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430695 | Through silicon via fabrication | Son T. Lu, Elenita Malasmas Chanhvongsak | 2022-08-30 |
| 11268928 | Compact gas sensor including a MEMS element having capillaries to facilitate gas diffusion | Richard Wade, Keith Francis Edwin Pratt, Scott Edward Beck, Vijayakumar S, Cristian Diaconu | 2022-03-08 |