Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524382 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Denis Ivanov, Jun Qian | 2022-12-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524382 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Denis Ivanov, Jun Qian | 2022-12-13 |