Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393729 | Systems and methods for controlling plasma instability in semiconductor fabrication | Yukinori Sakiyama, Douglas Keil | 2022-07-19 |
| 11258421 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Yaswanth Rangineni | 2022-02-22 |