Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524382 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Harry Q. Lee, Jun Qian | 2022-12-13 |
| 11348783 | Methods and apparatus for dynamical control of radial uniformity with two-story microwave cavities | Satoru Kobayashi, Hideo Sugai, Lance A. Scudder, Dmitry Lubomirsky | 2022-05-31 |