Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264206 | Methods and systems for forming a pattern on a surface using multi-beam charged particle beam lithography | Thang Nguyen, Ajay Baranwal, Michael Meyer, Suhas Pillai | 2022-03-01 |