Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462427 | Interface device for a purging unit for purging a wafer container | Bernhard Stein, Udo Scheller, Heinz-Martin Esser, Steffen Pollack | 2022-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462427 | Interface device for a purging unit for purging a wafer container | Bernhard Stein, Udo Scheller, Heinz-Martin Esser, Steffen Pollack | 2022-10-04 |