Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508591 | High resolution electron beam apparatus with dual-aperture schemes | Xinrong Jiang, Nikolai Chubun, Luca Grella | 2022-11-22 |
| 11335608 | Electron beam system for inspection and review of 3D devices | Xinrong Jiang | 2022-05-17 |
| 11302510 | Space charge insensitive electron gun designs | Luca Grella | 2022-04-12 |