Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491608 | Detection method and detection apparatus for polishing pad of chemical mechanical polishing device | Hsien-Ming Lee, Chun-Chen Chen, Po-Ching Huang | 2022-11-08 |
| 11359906 | Method, system and apparatus for uniformed surface measurement | Chao Chen, Jen-Chieh Li, Yong-Jie Ciou, Hsien-Ming Lee, Jian-Shian Lin +1 more | 2022-06-14 |