Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482433 | Stacked thermal processing chamber modules for remote radiative heating in semiconductor device manufacture | Chao-Kai Liang, Miye Hopkins, Weimin Han, Robert James | 2022-10-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482433 | Stacked thermal processing chamber modules for remote radiative heating in semiconductor device manufacture | Chao-Kai Liang, Miye Hopkins, Weimin Han, Robert James | 2022-10-25 |