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IS Institute Of Microelectronics Of The Chinese Academy Of Sciences: 1 patents #13 of 55Top 25%
Overall (2022): #531,877 of 548,613Top 100%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11447876 High-precision etching method Huilong Zhu, Xiaogen YIN, Chen-Yu Li, Yongkui ZHANG 2022-09-20