Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392031 | Radiation based patterning methods | Alan J. Telecky, Douglas A. Keszler, Andrew Grenville | 2022-07-19 |
| 11347145 | Pre-patterned lithography templates | Andrew Grenville | 2022-05-31 |
| 11327398 | Photoresist compositions and methods for fabricating semiconductor devices using the same | Chawon Koh, Tsunehiro Nishi, Brian J. Cardineau, Sangyoon Woo, Soo Young Choi | 2022-05-10 |