Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492249 | MEMS sensor, MEMS sensor system and method for producing a MEMS sensor system | David Tumpold | 2022-11-08 |
| 11279120 | Device and method for debonding a structure from a main surface region of a carrier | Alfred Sigi, Daniel Porwol | 2022-03-22 |