Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501947 | Aberration corrector and method of aligning aberration corrector | Matthias Firnkes, Florian Lampersberger, Thomas Kernen, Shem Yehoyda Prazot Ofenburg | 2022-11-15 |
| 11257657 | Charged particle beam device with interferometer for height measurement | Rony Reuveni, Alexander Goldenstein | 2022-02-22 |