Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360380 | Extreme ultraviolet lithography device | Joern-Holger Franke | 2022-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360380 | Extreme ultraviolet lithography device | Joern-Holger Franke | 2022-06-14 |