Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361985 | Substrate supporting device and substrate processing apparatus | Jong Sik Kim, Su Yeon Lee | 2022-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361985 | Substrate supporting device and substrate processing apparatus | Jong Sik Kim, Su Yeon Lee | 2022-06-14 |