Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322331 | Charged particle beam apparatus | Yuta MURAKAMI | 2022-05-03 |
| 11217422 | Charged particle beam system and method of measuring sample using scanning electron microscope | Yuta MURAKAMI, Takakuni Maeda, Akira Abe, Masatsugu Kawamoto, Hiroki Mezaki | 2022-01-04 |