Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525853 | Temperature test apparatus and temperature test method | Tomohiko Maruo, Yasuhiko Nago | 2022-12-13 |
| 11486833 | Method for evaluating edge shape of silicon wafer, apparatus for evaluating thereof, silicon wafer, method for selecting and method for manufacturing thereof | Masahiro Sakurada, Makoto Kobayashi, Koichi Kanaya | 2022-11-01 |
| 11422008 | Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same | — | 2022-08-23 |
| 11324147 | Coolant flow cooling structure for a power conversion device | Daiki Kudo, Masahiro Shimada, Kenichi Sasaki | 2022-05-03 |