Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380573 | Structure for automatic in-situ replacement of a part of an electrostatic chuck | Daisuke Hayashi | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380573 | Structure for automatic in-situ replacement of a part of an electrostatic chuck | Daisuke Hayashi | 2022-07-05 |