Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521880 | Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber | Ichiro NUNOMURA, Tsukasa Iida, Hitoshi Sekihara, Kazunori Tsutsuguchi, Jin SHIBATA | 2022-12-06 |