Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424105 | Plasma processing apparatus | Isao Mori, Masaru Izawa, Norihiko Ikeda, Kazuya Yamada | 2022-08-23 |
| 11417501 | Plasma processing apparatus and plasma processing method | Masayuki Shiina, Tetsuo Ono | 2022-08-16 |
| 11355315 | Plasma processing apparatus and plasma processing method | Norihiko Ikeda | 2022-06-07 |