Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538659 | Charged particle beam device, autofocus processing method of charged particle beam device, and detector | Mitsuhiro Nakamura | 2022-12-27 |
| 11348757 | Charged particle beam device | Shuhei YABU, Shin Imamura, Masaaki Komatsu | 2022-05-31 |
| 11348758 | Charged particle beam device | Anoru Suga, Shuhei YABU, Kazuki ISHIZAWA | 2022-05-31 |