Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488804 | Shower head assembly and plasma processing apparatus having the same | Youngwon Shin, Heechul Lee, Hyunjae Jung, Hyungchul Cho | 2022-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488804 | Shower head assembly and plasma processing apparatus having the same | Youngwon Shin, Heechul Lee, Hyunjae Jung, Hyungchul Cho | 2022-11-01 |