Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11305985 | MEMS device and manufacturing method thereof | Wei Sun, Yongxiang Wen, Junshan Ge, Zhijian Ma | 2022-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11305985 | MEMS device and manufacturing method thereof | Wei Sun, Yongxiang Wen, Junshan Ge, Zhijian Ma | 2022-04-19 |