Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11496820 | MEMS device with quadrilateral trench and insert | Xingshuo Lan | 2022-11-08 |
| 11262226 | Hybrid mass flow sensor including a thermal and coriolis principle measurement arrangements | — | 2022-03-01 |