Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11337292 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Georg Soumagne | 2022-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11337292 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Georg Soumagne | 2022-05-17 |