Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491428 | Chemical liquid purification method and chemical liquid | Tetsuya KAMIMURA, Masahiro Yoshidome | 2022-11-08 |
| 11429018 | Method of manufacturing chemical fluid for manufacturing electronic material, pattern forming method, method of manufacturing semiconductor device, chemical fluid for manufacturing electronic material, container, and quality inspection method | Tetsuya Shimizu, Tsukasa Yamanaka | 2022-08-30 |
| 11351503 | Chemical liquid purification method | Tetsuya KAMIMURA, Masahiro Yoshidome | 2022-06-07 |