Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11458512 | Systems and methods for rotating and translating a substrate in a process chamber | — | 2022-10-04 |
| 11355376 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2022-06-07 |